Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films

Abou-Ras, D.; Caballero, R.; Fischer, C.-H.; Kaufmann, C.A.; Lauermann, I.; Mainz, R.; Schorr, S.; Eicke, A.; Döbeli, M.; Gade, B.; Hinrichs, J.; Nunney,T.; Dijkstra, H.; Hoffmann, V.; Klemm, D.; Efimova,V.; Bergmaier,A. "Comprehensive comparison of various techniques for the analysis of elemental distributions in thin films" Microscopy and Microanalysis 17, 5, pp. 728 - 751. 2011 DOI: 10.1017/S1431927611000523