Silicon thin-film solar cells at high growth rate under constant power-to-flow ratio plasma conditions

Santos J.D., Carabe J., Gandia J.J. "Silicon thin-film solar cells at high growth rate under constant power-to-flow ratio plasma conditions" Thin Solid Films 597, pp. 97 - 103. 2015 DOI: 10.1016/j.tsf.2015.11.011