Epifani, M.; Zamani, R.; Arbiol, J.; Andreu, T.; Fabrega, C.; Pace, G.B.; Siciliano, P.; Morante, J.R. "Sol-Gel Synthesis and Structural Characterization of Ta2O5 Thin Films from Tantalum Chloromethoxide, PROCEEDINGS TCM 2012 (submitted for publication at Thin Solid Films, October 2012), 2012" PROCEEDINGS TCM 2012 pp. - 2012